Advanced Facilities Efficient ProductionAccording to reports, domestic semiconductor equipment manufacturer Zhongsheng Optoelectronics Equipment (Shanghai) Co., Ltd. (hereinafter referred to as "Zhongsheng Optoelectronics") has launched new MOCVD technology and models for deep ultraviolet LED applications, further reducing equipment costs and increasing production capacity.
According to the data, Zhongsheng Optoelectronics was established in May 2011 and is headquartered in Zhangjiang High-tech Park, Pudong, Shanghai. It focuses on the research and development and production of MOCVD equipment for the manufacture of LED and second/third generation semiconductor components. It is one of the few domestically owned independent core technologies. One of the largest MOCVD manufacturing companies. Moreover, according to People's Daily Online, Zhongsheng Optoelectronics and China Microelectronics once broke the long-term monopoly of German Aixtron and American Veeco on the Chinese market in the field of LED lighting.
From 2016 to 2017, Zhongsheng Optoelectronics and Jetson Semiconductor, a leading domestic deep ultraviolet LED manufacturer, jointly developed and industrialized the first deep ultraviolet MOCVD equipment in China - ProMaxy® UV, which has become the research and development and production capacity of deep ultraviolet LED technology since 2020. One of the main models of expansion. Recently, Semiconductor Industry Network reported that Zhongsheng Optoelectronics has made new breakthroughs in deep ultraviolet MOCVD equipment.
It is reported that with the continuous expansion and promotion of deep ultraviolet LED applications, the market has put forward higher requirements for the power conversion efficiency, yield and production cost of deep ultraviolet LED products. From the perspective of epitaxy, the material crystal quality, surface morphology characteristics and crack control of AlN (aluminum nitrogen) epitaxial growth for deep ultraviolet LEDs have a significant impact on improving power conversion efficiency and yield, and MOCVD equipment is used as epitaxy technology. Core equipment also needs to be upgraded to meet higher requirements.
To this end, based on the core technology of ProMaxy® UV independent innovation, Zhongsheng Optoelectronics further innovated and optimized the temperature field control of the reaction chamber, the transmission and uniform distribution of the reaction gas and other technologies, and established a high-quality AlN that can be epitaxially produced. The new MOCVD core technology that can expand production capacity (at least 15x2) and reduce production costs.
At the same time, in order to further reduce equipment costs and increase production capacity, Zhongsheng Optoelectronics also launched a ProMaxy® UV model that can be configured with 4 reaction chambers. This model can not only epitaxially produce the full structure of deep ultraviolet LEDs in each cavity, but also can integrate epitaxial production of AlN substrates and LED structures in separate cavities.
At present, Jayson Semiconductor has 4 deep UV MOCVD equipment of Zhongsheng Optoelectronics, which are used for mass production of epitaxial products to meet the needs of deep UV LED applications such as medical sterilization, white goods, and water purification. Jason Semiconductor said that using Zhongsheng Optoelectronics' new MOCVD technology and multi-cavity configuration models, high-quality AlN substrates required for mass production can be obtained, while also significantly increasing production capacity and reducing epitaxy production costs.
It is reported that in addition to Jason Semiconductor, many domestic customers have adopted the new MOCVD technology of Zhongsheng Optoelectronics and obtained high-quality and low-cost AlN substrates. The specific advantages are: surface features Rq<0.5nm, edge cracks Controlled at <2mm. Zhongsheng Optoelectronics said that in the future, it will launch new solutions through continuous innovation to meet the growing needs of deep ultraviolet LED technology development and mass production.
It is also worth noting that Zhongsheng Optoelectronics has gradually expanded its investment in the field of third-generation semiconductor MOCVD equipment in recent years. In 2020, Zhongsheng Optoelectronics' ProMaxy® PD equipment for third-generation semiconductor GaN discrete devices has entered the stage of market evaluation and verification. In August of the same year, Zhongsheng Optoelectronics obtained a capital of 113 million yuan led by Shanghai Pudong Science and Technology Group Co., Ltd. for the research and development and production of high-end equipment for the second/third generation semiconductor discrete devices.
Whether it is deep ultraviolet LED application or third-generation semiconductor application, Zhongsheng Optoelectronics has won the recognition and support of the capital market and application side. In the future, it is expected that the MOCVD equipment system based on its own core technology will be enhanced through innovative research and development and financing capabilities. The improvement of MOCVD equipment will boost the localization of MOCVD equipment.